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Structure and transport properties of p-type polycrystalline silicon fabricated from fluorinated source gas
T Kamiya, K Nakahata, K Ro, I ShimizuVolume:
394
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(01)01172-5
File:
PDF, 398 KB
english, 2001