Room temperature deposition of hydrogenated amorphous...

Thin Solid Films 2001 Vol. 394; Iss. 1-2

Room temperature deposition of hydrogenated amorphous carbon films from laser-assisted photolytic chemical vapor deposition at 248 nm

Mikael Lindstam, Mats Boman, Klaus Piglmayer
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Volume:
394
Year:
2001
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(01)01193-2
File:
PDF, 568 KB
english, 2001
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