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Study of the secondary-electron emission from thermally grown SiO2 films on Si
Whikun Yi, Taewon Jeong, SeGi Yu, Jeonghee Lee, Sunghwan Jin, Jungna Heo, J.M. KimVolume:
397
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(01)01492-4
File:
PDF, 154 KB
english, 2001