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Phase composition and microstructure of polycrystalline and epitaxial TaNx layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition
C.-S. Shin, Y.-W. Kim, D. Gall, J.E. Greene, I. PetrovVolume:
402
Year:
2002
Language:
english
Pages:
11
DOI:
10.1016/s0040-6090(01)01618-2
File:
PDF, 740 KB
english, 2002