Epitaxial Y2O3 film growth on an oxidized Si surface

Epitaxial Y2O3 film growth on an oxidized Si surface

M.-H. Cho, D.-H. Ko, Y.K. Choi, I.W. Lyo, K. Jeong, C.N. Whang
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Volume:
402
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(01)01625-x
File:
PDF, 761 KB
english, 2002
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