High Speed and High Resolution Measurements on Submicron...

Integrated Ferroelectrics 2003 / 03 Vol. 53; Iss. 1

High Speed and High Resolution Measurements on Submicron Capacitors for FeRAM Application

Schmitz, T., Tiedke, S., Prume, K., Roelofs, A., Szot, K., Waser, R.
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Volume:
53
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580390258318
Date:
March, 2003
File:
PDF, 150 KB
english, 2003
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