Influence of the sputtering gas on the preferred orientation of nanocrystalline titanium nitride thin films
Rajarshi Banerjee, Ramesh Chandra, Pushan AyyubVolume:
405
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0040-6090(01)01705-9
File:
PDF, 1.46 MB
english, 2002