Atomic layer deposition of BN thin films

Thin Solid Films 2002 Vol. 402; Iss. 1-2

Atomic layer deposition of BN thin films

Björn Mårlid, Mikael Ottosson, Ulrika Pettersson, Karin Larsson, Jan-Otto Carlsson
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Volume:
402
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(01)01706-0
File:
PDF, 104 KB
english, 2002
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