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Iron-assisted ion beam patterning of Si(001) in the crystalline regime
Macko, Sven, Grenzer, Jörg, Frost, Frank, Engler, Martin, Hirsch, Dietmar, Fritzsche, Monika, Mücklich, Arndt, Michely, ThomasVolume:
14
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/14/7/073003
Date:
July, 2012
File:
PDF, 2.95 MB
english, 2012