Preparation of boron carbide thin film by pulsed KrF...

Thin Solid Films 2002 Vol. 407; Iss. 1-2

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

Shin-ichi Aoqui, Hisatomo Miyata, Tamiko Ohshima, Tomoaki Ikegami, Kenji Ebihara
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Volume:
407
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)00025-1
File:
PDF, 624 KB
english, 2002
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