Investigation of an upflow cold-wall CVD reactor by gas phase Raman spectroscopy
Chinho Park, Jang Yeon Hwang, Min Huang, Timothy J. AndersonVolume:
409
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(02)00109-8
File:
PDF, 339 KB
english, 2002