Impurity redistributions in electroplated Cu films during...

Thin Solid Films 2002 Vol. 408; Iss. 1-2

Impurity redistributions in electroplated Cu films during self-annealing

Min-Seung Yoon, Young-Joon Park, Young-Chang Joo
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Volume:
408
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)00126-8
File:
PDF, 392 KB
english, 2002
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