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Room temperature deposition of ITO using r.f. magnetron sputtering
T.C Gorjanc, D Leong, C Py, D RothVolume:
413
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(02)00425-x
File:
PDF, 483 KB
english, 2002