Preparation of SnO2 films with high sensitivity and selectivity to C2H5OH by oxygen radical assisted electron beam evaporation for micro-machined gas sensors
Yaowu Mo, Yuzo Okawa, Takehito Nakai, Motoshi Tajima, Kazuki NatukawaVolume:
416
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)00608-9
File:
PDF, 356 KB
english, 2002