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Residual stress and thermal stability of the Fe–Ni–Cr/Invar bimetal membrane used for microactuation
Yu-Jung Hsu, Yen-Hwei Chang, Yin-Lai Chai, Guo-Ju ChenVolume:
418
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(02)00707-1
File:
PDF, 505 KB
english, 2002