Experimental and theoretical study of the role of the gas...

Experimental and theoretical study of the role of the gas composition and plasma–surface interactions on the SnOx films stoichiometry prepared by DC magnetron reactive sputtering

R Snyders, M Wautelet, R Gouttebaron, J.P Dauchot, M Hecq
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
423
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)01066-0
File:
PDF, 130 KB
english, 2003
Conversion to is in progress
Conversion to is failed