Experimental and theoretical study of the role of the gas composition and plasma–surface interactions on the SnOx films stoichiometry prepared by DC magnetron reactive sputtering
R Snyders, M Wautelet, R Gouttebaron, J.P Dauchot, M HecqVolume:
423
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)01066-0
File:
PDF, 130 KB
english, 2003