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Chemical vapor deposited RuOx films: annealing effects
P. Gopal Ganesan, Z. Shpilman, M. EizenbergVolume:
425
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(02)01108-2
File:
PDF, 582 KB
english, 2003