Development of a numerical simulation tool to study...

Thin Solid Films 2003 Vol. 427; Iss. 1-2

Development of a numerical simulation tool to study uniformity of large area PECVD film processing

L Sansonnens, J Bondkowski, S Mousel, J.P.M Schmitt, V Cassagne
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Volume:
427
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(02)01175-6
File:
PDF, 248 KB
english, 2003
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