Focused Ion Beam Induced Surface Damage Effect on the Mechanical Properties of Silicon Nanowires
Fujii, Tatsuya, Namazu, Takahiro, Sudoh, Koichi, Sakakihara, Shouichi, Inoue, ShozoVolume:
135
Language:
english
Journal:
Journal of Engineering Materials and Technology
DOI:
10.1115/1.4024545
Date:
June, 2013
File:
PDF, 8.89 MB
english, 2013