Advanced excimer-laser crystallization process for...

Thin Solid Films 2003 Vol. 427; Iss. 1-2

Advanced excimer-laser crystallization process for single-crystalline thin film transistors

Ryoichi Ishihara, Paul Ch. van der Wilt, Barry D. van Dijk, Artyom Burtsev, J.W. Metselaar, C.I.M. Beenakker
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Volume:
427
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0040-6090(02)01250-6
File:
PDF, 1.26 MB
english, 2003
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