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Epitaxial growth of strained Si1−yCy films by the hot-wire cell method and its application to metal oxide semiconductor devices
Tatsuro Watahiki, Katsuya Abe, Akira Yamada, Makoto KonagaiVolume:
430
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(03)00082-8
File:
PDF, 135 KB
english, 2003