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Al2O3 formation on Si by catalytic chemical vapor deposition
Yoh-Ichiro Ogita, Shinshi Iehara, Toshiyuki TomitaVolume:
430
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(03)00097-x
File:
PDF, 123 KB
english, 2003