Revisiting the B-factor variation in a-SiC:H deposited by...

Thin Solid Films 2003 Vol. 430; Iss. 1-2

Revisiting the B-factor variation in a-SiC:H deposited by HWCVD

Bibhu P. Swain, Samadhan B. Patil, Alka Kumbhar, R.O. Dusane
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Volume:
430
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(03)00107-x
File:
PDF, 88 KB
english, 2003
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