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Hot-wire chemical vapor deposition of high hydrogen content silicon nitride for solar cell passivation and anti-reflection coating applications
J.K. Holt, D.G. Goodwin, A.M. Gabor, F. Jiang, M. Stavola, Harry A. AtwaterVolume:
430
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(03)00131-7
File:
PDF, 116 KB
english, 2003