Cu Planarization in Electrochemical Mechanical...

Journal of The Electrochemical Society 2006 Vol. 153; Iss. 6

Cu Planarization in Electrochemical Mechanical Planarization

Liu, Feng Q, Du, Tianbao, Duboust, Alain, Tsai, Stan, Hsu, Wei-Yung
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Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2186180
File:
PDF, 549 KB
english, 2006
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