Formation of tantalum nitride films by rapid thermal processing
C Angelkort, A Berendes, H Lewalter, W Bock, B.O KolbesenVolume:
437
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(03)00603-5
File:
PDF, 309 KB
english, 2003