Structure of DC sputtered SiCN thin films

Thin Solid Films 2003 Vol. 440; Iss. 1-2

Structure of DC sputtered SiCN thin films

G. Radnóczi, G. Sáfrán, Zs. Czigány, T. Berlind, L. Hultman
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Volume:
440
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(03)00860-5
File:
PDF, 884 KB
english, 2003
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