Modified Thornton model for magnetron sputtered zinc oxide:...

Thin Solid Films 2003 Vol. 442; Iss. 1-2

Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

Oliver Kluth, Gunnar Schöpe, Jürgen Hüpkes, Chitra Agashe, Joachim Müller, Bernd Rech
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Volume:
442
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)00949-0
File:
PDF, 869 KB
english, 2003
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