Adhesion and interfacial structure of magnetron sputtered...

Thin Solid Films 2003 Vol. 444; Iss. 1-2

Adhesion and interfacial structure of magnetron sputtered TiNi films on Si/SiO2 substrate

Yongqing Fu, Hejun Du, Sam Zhang
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Volume:
444
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)01029-0
File:
PDF, 548 KB
english, 2003
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