Rapid thermal processed thin films of niobium pentoxide...

Rapid thermal processed thin films of niobium pentoxide (Nb2 O5) deposited by reactive magnetron sputtering

A. Pignolet, G.Mohan Rao, S.B. Krupanidhi
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Volume:
261
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(94)06470-9
File:
PDF, 823 KB
english, 1995
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