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Carbon depth distribution in spin-on silicon dioxide films
N.V. Gaponenko, H. Gnaser, P. Becker, V.A. GrozhikVolume:
261
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(95)06518-0
File:
PDF, 675 KB
english, 1995