Surface roughness of alumina films deposited by reactive r.f. sputtering
Yadun Zhao, Yitai Qian, Weichao Yu, Zuyao ChenVolume:
286
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(95)08514-9
File:
PDF, 330 KB
english, 1996