Interpretation of spectroscopic ellipsometry measurements...

Interpretation of spectroscopic ellipsometry measurements of ultrathin dielectric layers on silicon: impact of accuracy of the silicon optical constants

D. Tonova, M. Depas, J. Vanhellemont
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
288
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(96)08859-1
File:
PDF, 324 KB
english, 1996
Conversion to is in progress
Conversion to is failed