Structural properties of amorphous carbon nitride films...

Structural properties of amorphous carbon nitride films prepared by remote plasma-enhanced chemical vapor deposition

Joo Han Kim, Yong Hwan Kim, Dong Jun Choi, Hong Koo Baik
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Volume:
289
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(96)08906-7
File:
PDF, 379 KB
english, 1996
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