Structural properties of amorphous carbon nitride films prepared by remote plasma-enhanced chemical vapor deposition
Joo Han Kim, Yong Hwan Kim, Dong Jun Choi, Hong Koo BaikVolume:
289
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(96)08906-7
File:
PDF, 379 KB
english, 1996