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Yttria-stabilized zirconia thin films grown by r.f. magnetron sputtering from an oxide target
Henryk Tomaszewski, Johan Haemers, Nico De Roo, Jurgen Denul, Roger De GryseVolume:
293
Year:
1997
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(96)09089-x
File:
PDF, 1.63 MB
english, 1997