Investigation on solid phase epitaxy of deposited SiGe film...

Thin Solid Films 1997 Vol. 293; Iss. 1-2

Investigation on solid phase epitaxy of deposited SiGe film on a Si substrate

Wen-Jie Qi, Bing-Zong Li, Guo-Bao Jiang, Zhi-Guang Gu, T.K. Kwok, R.J. Zhang, P.K. Chu
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Volume:
293
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(96)09112-2
File:
PDF, 648 KB
english, 1997
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