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Aluminum nitride and alumina composite film fabricated by DC plasma processes
Paul W. Wang, Shixian Sui, Wensheng Wang, William DurrerVolume:
295
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(96)09270-x
File:
PDF, 548 KB
english, 1997