Effect of chamber pressure on p-type μc-SiC:H thin films...

Thin Solid Films 1997 Vol. 295; Iss. 1-2

Effect of chamber pressure on p-type μc-SiC:H thin films prepared by photo-CVD

Arup Dasgupta, Sukriti Ghosh, S.T. Kshirsagar, Swati Ray
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Volume:
295
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(96)09282-6
File:
PDF, 567 KB
english, 1997
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