Optical properties of polycrystalline silicon thin films deposited by single-wafer chemical vapor deposition
M. Marazzi, M.E. Giardini, A. Borghesi, A. Sassella, M. Alessandri, G. FerroniVolume:
296
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(96)09376-5
File:
PDF, 242 KB
english, 1997