Influence of etch stops on the microstructure of porous silicon layers
S Billat, M Thönissen, R Arens-Fischer, M.G Berger, M Krüger, H LüthVolume:
297
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(96)09421-7
File:
PDF, 230 KB
english, 1997