Porous silicon layers used for gas sensor applications

Thin Solid Films 1997 Vol. 297; Iss. 1-2

Porous silicon layers used for gas sensor applications

A Foucaran, F Pascal-Delannoy, A Giani, A Sackda, P Combette, A Boyer
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Volume:
297
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(96)09437-0
File:
PDF, 269 KB
english, 1997
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