Ion-assisted growth of Ti1−xAlxN/Ti1−yNbyN multilayers by...

Thin Solid Films 1997 Vol. 302; Iss. 1-2

Ion-assisted growth of Ti1−xAlxN/Ti1−yNbyN multilayers by combined cathodic-arc/magnetron-sputter deposition

I. Petrov, P. Losbichler, D. Bergstrom, J.E. Greene, W.-D. Münz, T. Hurkmans, T. Trinh
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Volume:
302
Year:
1997
Language:
english
Pages:
14
DOI:
10.1016/s0040-6090(96)09524-7
File:
PDF, 1.28 MB
english, 1997
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