Carbon nitride CNx film deposition assisted by IR laser...

Thin Solid Films 1997 Vol. 302; Iss. 1-2

Carbon nitride CNx film deposition assisted by IR laser ablation in a cold remote nitrogen plasma

C. Jama, V. Rousseau, O. Dessaux, P. Goudmand
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Volume:
302
Year:
1997
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(96)09541-7
File:
PDF, 622 KB
english, 1997
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