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Characterization of unintentionally or lightly doped polysilicon films by improved Hall effect measurements
F. Le Bihan, B. Fortin, S. Cauneau, D. Briand, O. BonnaudVolume:
301
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(96)09549-1
File:
PDF, 196 KB
english, 1997