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Process Antenna Effect Elimination in Ultra Deep Submicron
Wu, Xiu Long, Lin, Zhi Ting, Meng, Jian, Chen, Jun NingVolume:
229-231
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.229-231.1519
Date:
November, 2012
File:
PDF, 237 KB
english, 2012