Characteristics of ZnO thin films deposited onto Al/Si...

Thin Solid Films 1997 Vol. 302; Iss. 1-2

Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputtering

Ki Hyun Yoon, Ji-Won Choi, Dong-Heon Lee
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Volume:
302
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(96)09568-5
File:
PDF, 386 KB
english, 1997
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