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Depth-sensitive strain analysis of a W–Ta–W trilayer
S.G Malhotra, Z.U Rek, S.M Yalisove, J.C BilelloVolume:
301
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(96)09570-3
File:
PDF, 185 KB
english, 1997