Morphology of TiSi2 films on Si formed from co-deposited Ti...

Thin Solid Films 1997 Vol. 302; Iss. 1-2

Morphology of TiSi2 films on Si formed from co-deposited Ti and Si

S.B. Herner, V. Krishnamoorthy, A. Naman, K.S. Jones, H.-J. Gossmann, R.T. Tung
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Volume:
302
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(96)09586-7
File:
PDF, 524 KB
english, 1997
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