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Properties of indium tin oxide (ITO) films prepared by r.f. reactive magnetron sputtering at different pressures
Li-jian Meng, M.P. dos SantosVolume:
303
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00050-3
File:
PDF, 465 KB
english, 1997