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Surface studies of chemically vapour-deposited silicon films using friction force microscopy
C. Flueraru, C. Cobianu, P. Cosmin, D. DascaluVolume:
303
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00083-7
File:
PDF, 494 KB
english, 1997